NonliNEAR vertical oscillations of a particle in a sheath of a rf discharge.

نویسندگان

  • A V Ivlev
  • R Sütterlin
  • V Steinberg
  • M Zuzic
  • G Morfill
چکیده

A new simple method to measure the spatial distribution of the electric field in the plasma sheath is proposed. The method is based on the experimental investigation of vertical oscillations of a single particle in the sheath of a low-pressure radio-frequency discharge. It is shown that the oscillations become strongly nonlinear as the amplitude increases. The theory of anharmonic oscillations provides a good quantitative description of the data and gives estimates for the first two anharmonic terms in an expansion of the sheath potential around the particle equilibrium.

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عنوان ژورنال:
  • Physical review letters

دوره 85 19  شماره 

صفحات  -

تاریخ انتشار 2000